面向机动车污染物排放监测的混合电位式钇稳定氧化锆微型二氧化氮传感器 尤睿 著 工业技术

《面向机动车污染物排放监测的混合电位式钇稳定氧化锆微型二氧化氮传感器（英文版）》介绍了气体传感器研究的重要进展，混合电位的气体检测机理，固体电解质式传感器的基础设计、分析与制造技术，对于电化学气敏元件的设计、制造及应用具有很好的启示。
《面向机动车污染物排放监测的混合电位式钇稳定氧化锆微型二氧化氮传感器（英文版）》可供高等院校微电子、微机电系统、电化学、精密仪器等专业的研究人员使用，也可供相关领域的工程技术人员参考。
1 Introduction 1
1.1 Background of Research 1
1.1.1 Significance of Fuel-Powered Automobile Exhaust Detection 1
1.1.2 Overview of Gas Sensors 4
1.1.3 Application Status of Exhaust Detection Sensors 7
1.2 Overview of Solid Electrolyte Sensors 11
1.2.1 Research on Solid Electrolyte Material 11
1.2.2 Research on YSZ Material 11
1.2.3 Working Principles and Classification of Solid Electrolyte Gas Sensors 14
1.3 Overview of YSZ-Based Mixed Potential NO2 Sensor 19
1.3.1 Working Principle of YSZ-Based Mixed Potential NO2 Sensor 19
1.3.2 Status Quo of Research on YSZ-Based Mixed Potential NO2 Sensor 21
1.3.3 Shortcomings in the Present Research on YSZ-Based Mixed Potential NO2 Sensor 31
1.4 Main Research in This Paper 33
References 34
2 Research on Optimization of Sensitive Properties of Sensor Electrode Materials 41
2.1 Introduction 41
2.2 Research on Sensitive Materials of Binary Composite Oxide 43
2.2.1 Preparation for Material Synthesis 43
2.2.2 Synthesis and Preparation of Ce/Fe and Ce/Cr Binary Composite Oxides 43
2.2.3 Material Characterization of Ce/Fe and Ce/Cr Binary Composite Oxides 45
2.3 Preparation of Planar NO2 Sensors Based on Ce/Fe and Ce/Cr Sensing Electrodes 51
2.3.1 Sensor Preparation 51
2.3.2 Preparation and Encapsulation of Planar YSZ-Based NO2 Sensors 52
2.4 Performance Testing and Analysis of Ce/Fe, Ce/Cr Composite Oxide NO2 Sensors 53
2.4.1 Testing Methods and Characterization of Sensors 53
2.4.2 Analysis on Experimental Results and Phenomena 56
References 70
3 Research on Enhancement Technique of Sensor Boundary Activity 73
3.1 Introduction 73
3.2 Research on Improvement Technology of Surface Microstructure by Low-Energy Ion Beam Etching 74
3.2.1 Experimental Materials and Equipment 74
3.2.2 Improvement Scheme of Low-Energy Ion Beam for YSZ Surface Microstructures 75
3.2.3 Microstructural Characterization and Analysis of YSZ Surfaces 77
3.3 Preparation and Characterization of NiO Sensing Electrode Materials 79
3.3.1 Preparation for Material Synthesis 81
3.3.2 Synthesis and Preparation of NiO Sensing Materials 81
3.3.3 Characterization of NiO Sensing Electrode Materials 82
3.3.4 Preparation of Planar YSZ-Based NO2 Sensors 83
3.4 Performance Test and Analysis of NO2 Sensors 83
3.5 Summary 91
References 92
4 Research and Development of Flexible Mixed Potential NO2 Sensors with Low Power Consumption 93
4.1 Introduction 93
4.2 Simulation and Design of Integrated Microheaters 94
4.2.1 Presentation and Design of YSZ-Based Microheaters 94
4.2.2 Simulation Results and Analysis of Microheaters 98
4.3 Fabrication and Characterization of Flexible YSZ-Based NO2 Sensors 99
4.3.1 Selection and Preparation of YSZ Film Materials 99
4.3.2 Experimental Materials and Equipment 102
4.3.3 Preparation of YSZ-Based NO2 Sensors with the “Sandwich” Structure 102
4.3.4 Fabrication Process Characterization of the Sensor 106
4.4 Performance Test and Analysis of Mixed Potential NO2 Sensors 108
4.4.1 Test Methods and Characterization of Sensors 108
4.4.2 Experimental Results and Phenomenon Analysis 110
4.5 Summary 117
References 118
5 Summary and Prospects 119
5.1 Summary of this Paper 119
5.2 Research Prospects 122
尤睿，清华大学精密仪器系工学博士。现任北京大学信息科学技术学院、微纳电子学系“博雅”项目博士后、助理研究员。清华大学优秀博士毕业生，测量控制与仪器仪表领域全国优秀博士论文获得者，博士后科学基金获得者。研究领域：微纳传感器与执行器，微机电系统（MEMS）工艺，气体传感与检测，微系统集成技术。